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ALD Lab Saxony Symposium 2018

The 7th ALD Symposium will be organized by ALD Lab Saxony and the working group R&D of Silicon Saxony, 10th of December 2018 in Dresden / Germany.

The ALD Symposium is a yearly event organized since 2012 by the ALD Lab Saxony cluster. The symposium is intended to improve visibility of the Atomic Layer Deposition technique and its capabilities and to increase the networking within the ALD community and beyond. The given talks show an overview of various research and development topics as well as examples of ALD applications in manufacturing.

 This year’s event is co-opted by the Silicon Saxony Working group R&D and will take place in Dresden. The agenda combines talks from ALD Lab Saxony members and partners from academia and industry on ALD equipment, applications, metrology and simulations.


December 10, 2018
14:00 - 18:00 o'clock


Technische Universität Dresden
- Werner-Hartmann-Bau -
Nöthnitzer Str. 66
01187 Dresden

Program // 14-18 pm

PRESENTATIONS (14:00 - 16:00)


Stefan Uhlig/Cool Silicon

ALD/CVD applications, equipment and precursors in high volume manufacturing
Dr. Jonas Sundqvist/ Fraunhofer IKTS

Synthesis of self-assembled 3D nanostructures using metastable atomic layer deposition 
Mario Ziegler/ Leibniz-Institut für Photonische Technologien Jena 

Atomic layer deposition @ IFW
Andy Thomas/ Leibniz-Institut für Festkörper- und Werkstoffforschung

Zr precursor screening for semiconductor applications 
Monica Materano/ NamLab 

BREAK (15:10-15:20)

ALD layers for reduced wear on micro cutting tools
Toni Junghans/ Westsächsische Hochschule Zwickau

Felix Winkler/ Technische Universität Dresden, Institut für Halbleiter und Mikrosysteme 

ALD activities within Research Fab Microelectronics Germany FMD 

Bernd Hintze/ Forschungsfabrik Mikroelektronik Deutschland 

WORLD CAFE (16:00-18:00)
Station 1 – the future of ALX 2019/2020
Station 2 – ALD R&D projects ideas
Station 3 – Internationalisation (players, cooperations, events etc.)

Wrap up world café
Stefan Uhlig/ Cool Silicon

NETWORKING (18:00 - open end)
After the official parts, we would be very happy if you accompany us to a trip over the 584. Dresdner Striezelmarkt 2018 and enjoy some networking with a hot cup of delicious mulled wine


The registration is open. Participation is free of cost. 

Go to registration


The ALD Symposium is a great opportunity to present your products and services to our high-tech community. Please contact jonas.sundqvist@ikts.fraunhofer.de  for sponsoring packages.


Jonas Sundqvist
Fraunhofer IKTS 
E-mail: info@ald-lab-saxony.de 

Anne Höer
Cool Silicon e. V.
Tel: 0351-8925 800
E-mail: anne.hoeer@cool-silicon.de

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